Volume 4, Issue 1, November 2016, Page: 1-9
Modeling of MEMS Resonator Piezoelectric Disc Partially Covered with Electrodes
Ismail Naciri, Laboratoire Sciences Ingénierie et Energie, Energie Renouvelable, Microsystèmes Acoustique et Micanique, Polydisciplinary Faculty of Ouarzazate, Ibn Zohr University, Morocco
Lahoucine Elmaimouni, Laboratoire Sciences Ingénierie et Energie, Energie Renouvelable, Microsystèmes Acoustique et Micanique, Polydisciplinary Faculty of Ouarzazate, Ibn Zohr University, Morocco
Jean-Etienne Lefebvre, The Institute of Electronics, Microelectronics and Nanotechnology, Opto-Acousto-Electronic Department, University of Valenciennes, France
Faniry Emilson Ratolojanahary, Laboratory of applied Physics, Fianarantsoa University, Madagascar
Mohamed Rguiti, Laboratoire des Matériaux Céramiques et procédés Associés, Université de Valenciennes, Maubeuge, France
Tadeusz Gryba, The Institute of Electronics, Microelectronics and Nanotechnology, Opto-Acousto-Electronic Department, University of Valenciennes, France
Received: Aug. 31, 2016;       Accepted: Sep. 26, 2016;       Published: Oct. 19, 2016
DOI: 10.11648/j.ajma.20160401.11      View  2983      Downloads  118
Abstract
The Legendre polynomial method has been extended to the modeling of MEMS resonator disc partially covered with electrodes. The disc has been divided into two areas: one with electrodes and the other without electrodes. For each area, The Maxwell equations and the piezoelectric constitutive equations of motion are studied and solved to yield a frequency response and electrical behavior of the MEMS resonator applying a semi analytical method based on a Legendre polynomials series and trigonometric functions. However, the method allows incorporating the boundary conditions directly into the governing equations by assuming position-dependent of elastic constants, mass density and delta functions. The alternating electrical source is described by specific terms which are also introduced into the equation of motion. The formalism has been developed which allows for both harmonic and modal analyses. In order to validate our polynomial approach, numerical results are presented such as resonant and anti-resonant frequencies, electric input admittance, electromechanical coupling coefficient and field profiles of fully and partially metallized PZT5A resonator discs. The results obtained were compared with those obtained by an approximated analytical method. The developed software proves to be very efficient to retrieve the contour modes of all orders.
Keywords
MEMS Resonators, Legendre Polynomial Approach, Centralized Metallization, Piezoelectric Resonator Disc, Electrical Admittance, Resonant, Anti-resonant Frequencies
To cite this article
Ismail Naciri, Lahoucine Elmaimouni, Jean-Etienne Lefebvre, Faniry Emilson Ratolojanahary, Mohamed Rguiti, Tadeusz Gryba, Modeling of MEMS Resonator Piezoelectric Disc Partially Covered with Electrodes, American Journal of Mechanics and Applications. Vol. 4, No. 1, 2016, pp. 1-9. doi: 10.11648/j.ajma.20160401.11
Copyright
Copyright © 2016 Authors retain the copyright of this article.
This article is an open access article distributed under the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0/) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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